B.E. (Automation and Robotics) Micro Electro Mechanical Systems MEMS Syllabus - Mumbai University 2026
The University has moved this degree onto NEP 2020 one year at a time. The first and second years are NEP 2020 syllabi; the third and fourth years are still examined on the REV-2019 'C' Scheme, which is what the University sets for them this year.
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Syllabus for Micro Electro Mechanical Systems (MEMS)
Module 1: Introduction to MEMS
- Unique characteristics of MEMS, Microsystems Technology- An Overview, typical MEMS and Microsystem Products, Scaling effects - scaling laws in miniaturization- Application of MEMS
Module 2: Material for MEMS and manufacturing
- Structure of silicon and other materials - Silicon wafer processing - Bulk micromachining and Surface micromachining, Wafer-bonding. Thin-film deposition, Lithography, wet etching and dry etching.
Module 3: Micro-fabrication methods
- LIGA and other moulding techniques- Soft lithography and polymer processing- Thick-film processing; Low temperature co-fired ceramic processing.
Module 4: MEMS components-micro sensors
- Micro sensors - Basic principles and working of micro sensors- Acoustic wave micro sensors- Bio-medical micro sensors- Bio-sensors- Chemical microsensors – Optical Sensors – Pressure micro sensors- Thermal micro sensors-acceleration micro sensors;
Module 5: Micro-actuators
- Basic principles and working of micro actuators- Electrostatic micro actuators- Piezoelectric micro actuators- Thermal micro actuators- SMA micro actuators- Electromagnetic micro actuators, micro valves, micro pumps.
Module 6
- Case studies /research based on MEMS applications-impact of materials, processes and design, Actuation using Shape Memory Alloys, Medical device, micropumps
Text books
- 1 MEMS and Microsystems Design and Manufacture by Tai-Ran Hsu, Tata McGraw- Hill Publishing Company Ltd.
- 2 Foundation of MEMS by Chang Liu, Pearson Education Fundamentals of Microfabrication and Nanotechnology, by Marc J. Madou, CRC Press, 2011, ISBN: 9780849331800 Micromachined Transducers Sourcebook, by Gregory Kovacs, WCB McGraw-Hill, Boston, 1998, ISBN: 9780071164627 Micromechanical Transducers: Pressure sensors, accelerometers, and gyroscopes, by M.H. Bao, Elsevier, New York, 2000, ISBN: 978-0444505583 Microsystem Design, by Stephen D Senturia, Springer Publication, 2000, ISBN: 9780792372462. Micro sensors - Principles and Applications, by Julian W. Gardner, John Wiley & Sons, Inc.1994, ISBN: 9780471941361. U University of Mumbai
Reproduced from the University of Mumbai syllabus for B.E. (Automation and Robotics) under REV-2019 'C' Scheme, in force from the academic year 2024-25. Wording is as printed in that syllabus. Module numbering is as printed there too.
The complete syllabus
This subject is cut from the University circular for its year. Open a document here if you want the whole thing rather than a single subject.